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Introduction to Microlithography
-1 %

Introduction to Microlithography

1.402 kr.

1.402 kr.

Tidligere laveste pris:

1.420 kr.

På lager

Man., 28 juli - fre., 1 aug.


Sikker betaling

14 dages åbent køb


Sælges og leveres af

Adlibris

Produktbeskrivelse

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Varenr.

7456dad6-6acc-46e7-baf3-f6909ec9ecbb

Funktioner

Antal sider

540 Sider

Foreslået køn

Ethvert køn

Skrevet af

Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

Udgiver

Oxford University Press

Udgivelsesdato

01/01/1994

International standard bookingnummer (ISBN)

9780841228481

Mindste ordremængde

1 stk

Introduction to Microlithography

1.402 kr.

1.402 kr.

Tidligere laveste pris:

1.420 kr.

På lager

Man., 28 juli - fre., 1 aug.


Sikker betaling

14 dages åbent køb


Sælges og leveres af

Adlibris